FAQ
FREQUENTLY ASKED QUESTIONS
Product FAQ
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Read our FAQ to quickly find the answer.
How is the temperature uniformity of this system?
The process chamber features a dual inner/outer cavity design, delivering exceptional temperature control uniformity.
How does the system control particle contamination?
The chamber features high-vacuum transfer technology and delivers exceptional particle performance, enabling ultra-clean production.
Does CBATCH need thermal regulation during processing?
From right to left are the preheating chamber, inner/outer process chambers, and cooling chamber, eliminating the need for repeated thermal regulation (heating/cooling cycles) and enabling continuous production.
What are main process technology applications of CBATCH？
Passivation for Mini LED backlight units, Brightness enhancement and passivation for RGB (red/yellow) LEDs, High-power GaN LED passivation, VCSEL (Vertical-Cavity Surface-Emitting Laser) passivation, Sidewall passivation for Micro LED displays, etc.
What are advantages of films deposited by CBATCH compared to competing solutions？
1. Improves device yield rate under "double 85" testing conditions； 2. Reduces device reverse leakage current； 3. Ultra-high throughput effectively lowers COO (Cost of Ownership)； 4. Multi-chamber design ensures higher cleanliness levels, suitable for high-volume production of Micro LED & micro-display, automotive-grade components and other premium applications
