QBT-I Dual-chamber High-speed Evaporator

QBT-I system is a compact system for indium high speed evaporation. Since indium has a relatively low melting point and requires low-temperature deposition, this system is equipped with a cryogenic cooling function that can lower the sample temperature to -70°C, ensuring a smooth indium bump surface. Additionally, it features a rapid quartz crystal microbalance (QCM) replacement module, enabling continuous indium deposition. This system provides an effective solution for flip-chip process and 3D chip chip techniques.

QBT-J Four-chamber Ultra-high Vacuum GLAD System

The system employs linear cascade technology, integrating four chambers for load-lock (pre-treatment) chamber, ion milling chamber, evaporator, oxidation chamber. The fully automated system features simple operation and easy maintenance, utilizing a pick-and-place transfer mechanism to minimize particulate generation. With QBT-J, customers can develop high-quality superconducting devices with broad application prospects across multiple fields.

QBT-E Dual-chamber Ultra-high Vacuum Electron Beam Evaporator

QBT-E system is a type of standard evaporation system with two process chambers: load-lock (pre-treatment) chamber and evaporator. UHV background enables high quality film deposition: metal, dielectric materials, optical films, magnetic films and so on. Sample manipulation includes tilting and rotation, or Z-stroke and rotation, enabling planetary or 3D structures.