For Industry
For R&D
ALD
Plasma Batch ALD
PBATCH Batch PEALD
Thermal Batch ALD
CBATCH 100s Batch Thermal ALD
CBATCH 300s Batch Thermal ALD
CVD
MPCVD Diamond CVD
Epitaxy
SICE-Y8 SiC Epitaxy CVD System
Powder ALD/CVD
KG Powder ALD for Mass Production
SCA Powder CVD for Mass Production
Single Wafer ALD
QBT-A High Vacuum Plasma-enhanced ALD System
MINI R&D Desktop ALD
Sputter
Single-Cathode Vertical Sputtering
QBT-P Dual-chamber Ultra-high Vacuum Magnetron Sputtering System
QBT-P L3 Triple-chamber Ultra-high Vacuum Magnetron Sputtering System(α-Ta、Nb-Ta)
PVD-100 Dual-chamber High Vacuum Magnetron Sputtering System
Multi-Cathode Vertical Sputtering
QBT-MPV Multi-target Ultra-high Vacuum Magnetron Vertical Sputtering System
Multi-Cathode Co-Sputtering
QBT-MPC Multi-target Ultra-high Vacuum Magnetron Co-Sputtering System
MP L Customized Series
QBT-MP·L3 Multi-chamber Ultra-high Vacuum Magnetron Sputtering System
Evaporator
QBT-I Dual-chamber High-speed Evaporator
QBT-J Four-chamber Ultra-high Vacuum GLAD System
QBT-E Dual-chamber Ultra-high Vacuum Electron Beam Evaporator
Powder ALD
GM R&D Powder ALD
QBT-T Dual-chamber Plasma-enhanced Wafer and Powder ALD System
产品
PRODUCT
Related products
Products category
CVD Related products
MPCVD enables high quality diamond single crystal and polycrystalline thin film growth for core 4th generation wide bandwidth semiconductor device manufacturing.
