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QBT-IDual-chamber High-speed Evaporator

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QBT-I system is a compact system for indium high speed evaporation. Since indium has a relatively low melting point and requires low-temperature deposition, this system is equipped with a cryogenic cooling function that can lower the sample temperature to -70°C, ensuring a smooth indium bump surface. Additionally, it features a rapid quartz crystal microbalance (QCM) replacement module, enabling continuous indium deposition. This system provides an effective solution for flip-chip process and 3D chip chip techniques.

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