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For Industry
|--ALD
|--CVD
|--Epitaxy
|--Powder ALD/CVD
For R&D
|--ALD
|--Sputter
|--Evaporator
|--Powder ALD

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What are technical advantages of PBATCH?

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1. Enables low-temperature plasma processing; 2. Maximum substrate size: 14 inches; 3. Built-in plasma cleaning function in process chamber; 4. Supports arbitrary thin-film stacking processes

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What are applications of PBATCH?

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Optical modules, lenses, traditional COB, and advanced packaging

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Can PBATCH deposit AR coatings?

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Definitely. Reflectance <0.1% in the visible spectrum

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How does PBATCH perform in terms of film layer reliability?

Yunmao Yunmao

1. Post-coating inspection: Clean appearance, free from bubbles and contamination 2. After surface pretreatment: Maintains flawless appearance with no bubbles or stains 3. Thermal shock resistance: No blistering, delamination or cracking observed 4. Extended reliability: Passes 1000-hour DH test (85°C/85%RH) with no blistering, delamination or cracking

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What products are included in Yunmao Technology's powder ALD series?

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Yunmao powder ALD equipment includes two main categories: R&D and Industrial systems. The GM series belongs to the R&D category, designed primarily for scientific applications, with series products GM100 and GM1000.

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