FAQ
FREQUENTLY ASKED QUESTIONS
Product FAQ
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Read our FAQ to quickly find the answer.
How low can the room-temperature resistivity of PE-TiN be achieved with the QBT-A system?
The 30nm PE-TiN film achieves a room-temperature resistivity of ≤70 μΩ·cm.
What is the maximum superconducting critical temperature achievable for NbN thin films deposited by the QBT-A system?
20nm NbN, Tc=14K
What is the uniformity of the oxide film thickness deposited by QBT-E？
Ti/SiO2 8inch film thickness uniformity < 3%
What are features and highlights of MINI？
It features a high level of integration, with only the size of an oven, making it compact and space-saving. It supports a wide range of processes and can fabricate materials such as HfO₂, ZnO, Al₂O₃, and TiO₂.
What is the maximum wafer size that MINI can produce？
MINI is a monolithic (single-wafer) research equipment capable of accommodating standard 6-inch wafers at maximum, and can also process small quantities of powdered samples (3g).
